TESCOM™ 64-3600 Series
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64-3600 Series ultra high purity, highly sensitive pressure reducing regulator offers a low droop, tied diaphragm design, 10 Ra / 0.25 micrometer surface finish with available Hastelloy® trim. Inlet pressures are 600 or 3500 psig / 41.4 or 241 bar with outlet pressure up to 150 psig / 10.3 bar. Ideal for use in 1/4" point-of-use, gas cabinets, semiconductor manufacturing and valve manifold boxes.
- Manufacturer:
Tescom
- Valve Type:
Regulators
- Sub-Type:
Tescom Regulators
- 10 Ra microinch / 0.25 micrometer internal surface finishes
- Metal-to-metal seal (diaphragm to body seal for high leak integrity)
- Full internal electropolish is available
- Designed to reduce pressure fluctuations in semiconductor gas systems
- Meets the stringent semiconductor requirements of both point-of-use and
- cylinder applications
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